| Technical Specifications |
|---|
| ● POWER SECTION |
| Power Supply Requirements | 24 Vdc (Operating range: 18 to 30 Vdc)
*Note: 15 Vdc power configurations available upon factory request. |
| Current Consumption Grid | | Device Configuration | Standard Output Modules | Profinet RT / EtherCAT Modules | | Mass Flow Meter (GIM) | Max. 100 mA | Max. 125 mA | | Flow Controller (GIC) Standard Valve | Max. 250 mA | Max. 340 mA | | Flow Controller (GIC) Double Valve (xDV) | Max. 490 mA | Max. 560 mA |
|
| ● INPUT SECTION |
| Measuring Ranges (Air/FS Selected) | Body Size ¼”: From 0 … 25 mln/min up to 0 … 60 ln/min (0…27 SCCM to 0…64 SLPM)
Body Size ½”: From 0 … 60 ln/min up to 0 … 450 ln/min (0…65 SLPM to 0…480 SLPM) |
| Media Compatibility | Real gas calibrations: Air, O2*, N2*, He, Ar, CO2, H2, CH4, C3H8.
*Note: O2 and N2 are dynamically calibrated with air. Other custom mixtures available on request. |
| Operating Pressure Range | 0.2 – 11 bar a (3 – 160 psia) standard.
*Limit: Controllers (GIC) fitted with valve types 4.5/EQP and 8/EQP DV operate max. 8 bar a (120 psia). |
| ● OUTPUT SECTION |
| Output Signals (Analog) | Current: 0-20 mA, 4-20 mA DC
Voltage: 0-5 V, 1-5 V, 0-10 V, 2-10 V DC
*Note: An additional calibration error margin of ±0.25% may apply for analog driven loops. |
| Output Signals (Digital) | RS-485 serial bus; Modbus RTU (Slave mode protocol); LabView-VIs ready.
Factory Interface Options: Profibus DP-V0, DP-V1, Profinet RT, or EtherCAT network modules. |
| ● PERFORMANCE |
| Instrument Accuracy Tiers | “Standard” Edition: ±1.0% of full scale (Turndown ratio 1 : 50).
“Hi-Performance” Edition: ±0.3% of full scale + ±0.5% of actual reading (Turndown ratio 1 : 100).
*Availability: Hi-Performance configuration restricted to meters GIM < 200 ln/min and controllers GIC < 150 ln/min (Air). |
| Dynamic Response Times | Mass Flow Meter (GIM): ±80ms max response
Mass Flow Controller (GIC): ±500ms max loop response
*Evaluated to SEMI E17-1011 standards from 5-100% range under optimized loop constraints. |
| Measurement Repeatability | ±0.2% of full scale value (calibrated in strict accordance with SEMI standard E56-0309). |
| Long-term Stability | < 1% of measured process value per year scaling variance. |
| Pressure Sensitivity Coefficient | <0.2% per bar (<0.014% per psi) of actual reading metrics (typical calibration under N2). |
| Temperature Sensitivity Coefficient | <0.025% FS range configuration type per 1°C change (<0.012% per 1°F). |
| Sensor Warm-up Duration | < 1 second required to achieve absolute specified instrumentation accuracy. |
| ● PHYSICAL |
| Process Fluid Connections | Flows up to 60 ln/min (64 SLPM): G¼” female block connection (BSPP Parallel thread)
Flows up to 450 ln/min (480 SLPM): G½” female block connection (BSPP Parallel thread) |
| Upstream Inlet Run Requirement | None required for sensor tracking stability. |
| Electrical Pin Interface | Cable gland assembly with compression fitting / Optional plug interface M12 connector (DIN-standard). |
| Mounting Configuration Orientation | All structural orientations supported. Horizontal layout orientation recommended for optimized process baseline. |
| ● MATERIAL |
| Wetted Flow Block Material | Stainless steel 316L block alloy core housing. |
| Electronic Enclosure Shell | Anodized industrial aluminum. |
| Elastomer O-Ring Seals | EPDM (FDA compliant compound) standard. Custom options include FKM and FFKM block seal configurations. |
| ● STANDARDS CONFORMITY |
| Hydrostatic Test Pressure | 16 bar a maximum burst test drive rating (240 psia). |
| Sensor Enclosure Leak Integrity | Certified outward leakage protection limit under < 1 × 10¹&sup0; mbar l/s He vacuum tracking. |
| Environmental Containment Rating | IP67 classification rating (fully matches NEMA 6 compliance criteria). |
| EMC Directive Compliance | Tested and validated in strict accordance with standard code EN 61326-1. |
| ATEX Hazardous Certifications | Gas atmospheres: II 3G nA IIC T4 Gc (Category 3 / Zone 2 compliant)
Dust atmospheres: II 3D Ex tc IIIC T100°C Dc (Category 3 / Zone 22 compliant) |
| Temperature Boundaries | Operating context for both gas media and surrounding ambient environment: 0 to 50°C (32 to 122°F). |
