The SERIES GFC Gas Mass Flow Controllers combine a straight tube sensor with a restrictor flow element. It is available for flow ranges up to 1000 L/min and offered in aluminum or 316 SS in 1/4″, 3/8″, 1/2″ and 3/4″ sizes.
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Product Applications
- Gas flow measurement
- Gas flow control
- Operating pumps and valves
- Process equipment
- Vacuum processes
- Glass and metal coating
- Film depostition
Service : Clean gases compatible with wetted parts.
Wetted Materials : GFC-1XXX: Anodized aluminum, brass, 316 SS and fluoroelastomer O-rings; GFC-2XXX: 316 SS and fluoroelastomer O-rings.
Accuracy : ±1% FS including linearity over 59 to 77°F (5 to 25°C) and 5 to 60 psia (0.34 to 4 bar); Series GFC X143, X144, X145, ±1.5% FS.
Repeatability : ±0.5% of FS.
Response Time : 2 seconds to within ±2% of actual flow.
Output : Linear 0 to 5 VDC and 4 to 20 mA.
Maximum Particulate Size : 5 microns.
Temperature Limits : 32 to 122°F (0 to 50°C).
Power Supply : ±12 VDC.
Process Connections : 1/4″ compression fitting for flow rates ≤50 L/m; 3/8″ for 100 and 200 L/m; 1/2″ for 500 L/min; 3/4″ for 1000 L/min.
Pressure Limits : 1000 psig (68.9 bar); Series GFC-X143, X144, X145, 500 psig (34.5 bar).
Leak Integrity : 1 x 10-9 sccs of He.Display:90° tiltable, 3-1/2 digit.
Agency Approvals : CE.